Special Topic Course: Biosensing with MEMS & NEMS
Within this course, topics may be offered from time to time to take advantage of the expertise of visitors to the University and academic staff in the IAS. Admission to the course is at the discretion of the Head of Engineering.
Learning Outcomes
Upon successful completion, students will have the knowledge and skills to:
- Outcome 1: Understand the fundamental working principle of bio-molecule sensing; have the basic idea of the conventional bio-molecule sensors.
- Outcome 2: Be able to use point fabrication procedures into practical process integration and use electrical measurements for MEMS mechanical structure characterisation.
- Outcome 3: Be able to understand the working principle of biosensors based on MEMS and micro-fludics; be able to estimate limitation of their sensitivities.
- Outcome 4: Quantitatively understand the fabrication of microfluidic devices, surface functionalization and limitation of surface micromachining.
- Outcome 5: Understand the merits of lab-on-chip devices based on MEMS and know the current challenge of bio-sensing.
Indicative Assessment
- Homework: 10 points per homework (three times)
- Midterm Paper Discussion: 20 points
- Final Project Report: 50 points
The ANU uses Turnitin to enhance student citation and referencing techniques, and to assess assignment submissions as a component of the University's approach to managing Academic Integrity. While the use of Turnitin is not mandatory, the ANU highly recommends Turnitin is used by both teaching staff and students. For additional information regarding Turnitin please visit the ANU Online website.
Workload
1.5 hours of lecture per week
2~3 hours of study at home per week
Requisite and Incompatibility
You will need to contact the Research School of Engineering to request a permission code to enrol in this course.
Prescribed Texts
- Nadim Maluf and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, · ISBN: 978-1580535908
- Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367
- Gabriel M. Rebeiz, “RF MEMS: Theory, Design, and Technology ,” Wiley-Interscience; 1st edition (June 15, 2002)
- Ville Kaajakari, “Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems,” 2009 (http://www.kaajakari.net/PracticalMEMS), Small Gear Publishing, ISBN: 978-0982299104
- James D. Plummer , Michael Deal , and Peter D. Griffin, “Silicon VLSI Technology: Fundamentals, Practice, and Modeling,” Prentice Hall, 2000, ISBN: 9780130850379
- Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition , CRC Press, 2011, ISBN: 978-0849331800
- Gregory T. Kovacs , “Micromacined Transducers Sourcebook,” 1st edition , McGraw-Hill, 1998, ISBN: 978-0072907223
- Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017
Assumed Knowledge
Understand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.Fees
Tuition fees are for the academic year indicated at the top of the page.
If you are a domestic graduate coursework or international student you will be required to pay tuition fees. Students continuing in their current program of study will have their tuition fees indexed annually from the year in which you commenced your program. Further information for domestic and international students about tuition and other fees can be found at Fees.
- Student Contribution Band:
- 2
- Unit value:
- 6 units
If you are an undergraduate student and have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). You can find your student contribution amount for each course at Fees. Where there is a unit range displayed for this course, not all unit options below may be available.
| Units | EFTSL |
|---|---|
| 6.00 | 0.12500 |
Course fees
- Domestic fee paying students
| Year | Fee | Description |
|---|---|---|
| 1994-2003 | $1650 | |
| 2014 | $2952 | |
| 2013 | $2946 | |
| 2012 | $2946 | |
| 2011 | $2946 | |
| 2010 | $2916 | |
| 2009 | $2850 | |
| 2008 | $2592 | |
| 2007 | $2298 | |
| 2006 | $2190 | |
| 2005 | $2190 | |
| 2004 | $2190 |
- International fee paying students
| Year | Fee |
|---|---|
| 1994-2003 | $3450 |
| 2014 | $3762 |
| 2013 | $3756 |
| 2012 | $3756 |
| 2011 | $3756 |
| 2010 | $3750 |
| 2009 | $3618 |
| 2008 | $3618 |
| 2007 | $3618 |
| 2006 | $3618 |
| 2005 | $3534 |
| 2004 | $3450 |
Offerings, Dates and Class Summary Links
ANU utilises MyTimetable to enable students to view the timetable for their enrolled courses, browse, then self-allocate to small teaching activities / tutorials so they can better plan their time. Find out more on the Timetable webpage.
Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.
First Semester
| Class number | Class start date | Last day to enrol | Census date | Class end date | Mode Of Delivery | Class Summary |
|---|---|---|---|---|---|---|
| 2920 | 17 Feb 2014 | 07 Mar 2014 | 31 Mar 2014 | 30 May 2014 | In Person | N/A |
Second Semester
| Class number | Class start date | Last day to enrol | Census date | Class end date | Mode Of Delivery | Class Summary |
|---|---|---|---|---|---|---|
| BioSensing with MEMS & NEMS | ||||||
| 6914 | 21 Jul 2014 | 01 Aug 2014 | 31 Aug 2014 | 30 Oct 2014 | In Person | N/A |
