- Code ENGN6334
- Unit Value 6 units
- Offered by Research School of Engineering
- ANU College ANU College of Engineering and Computer Science
- Course subject Engineering
- Areas of interest Engineering
This course introduces semiconductor physics, devices and technology. Physics topics comprise basic semiconductor physics, diodes, solar cells and transistors. Technology topics comprise oxidisation, diffusion, ion implantation, photolithography, film deposition, electrical interconnection, characterisation, packaging and process integration.
Upon successful completion, students will have the knowledge and skills to:
By the end of this course, you should be able to:
- Understand basic semiconductor physics
- Understand how diodes, solar cells and transistors work
- Understand basic semiconductor technology
- Be able to relate technology to the physics of semiconductor devices
- Have understanding of the context and use of semiconductor devices
Laboratories (10%); Seminar (15%); Quiz (15%); Final Exam (60%)
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Requisite and Incompatibility
The textbook is a choice of Introduction to Microelectronic Fabrication by Richard C. Jaeger, Vol V, Modular Series on Solid State Devices (Neudeck & Pierret eds), 2nd Edition, 2002 or S.M. Sze, Semiconductor Devices: Physics and Technology 3e, Wiley, 2006.
Knowledge of electronics
Tuition fees are for the academic year indicated at the top of the page.
If you are a domestic graduate coursework or international student you will be required to pay tuition fees. Tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.
- Student Contribution Band:
- Unit value:
- 6 units
If you are an undergraduate student and have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). You can find your student contribution amount for each course at Fees. Where there is a unit range displayed for this course, not all unit options below may be available.
Offerings, Dates and Class Summary Links
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Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.
|Class number||Class start date||Last day to enrol||Census date||Class end date||Mode Of Delivery||Class Summary|
|2237||20 Jul 2015||07 Aug 2015||31 Aug 2015||30 Oct 2015||In Person||N/A|