• Class Number 5713
  • Term Code 3160
  • Class Info
  • Unit Value 6 units
  • Mode of Delivery In Person
    • AsPr Yuerui Lu
    • AsPr Yuerui Lu
  • Class Dates
  • Class Start Date 26/07/2021
  • Class End Date 29/10/2021
  • Census Date 14/09/2021
  • Last Date to Enrol 02/08/2021
    • Hao Qin
SELT Survey Results

This is an interdisciplinary course that combines biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry. MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fludics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nanometer scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics.

Learning Outcomes

Upon successful completion, students will have the knowledge and skills to:

  1. Describe the fundamental working principle of bio-molecule sensing/sensors, and applying this knowledge to design solutions to probe biomedical and biology systems.
  2. Use point fabrication procedures in practical process integration.
  3. Demonstrate a detailed understanding of the fundamental principles of nanotechnology and their application to biomedical engineering.
  4. Analyse the fabrication of microfluidic devices, surface functionalization and the limitations of surface micromachining.
  5. Evaluate and employ electrical measurements for MEMS mechanical structure characterization, understanding possible problems encountered in livingsystems.
  6. Apply research principles, methods and theoretical concepts to execute research or design projects related to practical applications of MEMS/NEMS technology.

Nadim Maluf and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, · ISBN: 978-1580535908

Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367

Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800

Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017

Staff Feedback

Students will be given feedback in the following forms in this course:
  • Written comments
  • Verbal comments
  • Feedback to the whole class, to groups, to individuals, focus groups

Student Feedback

ANU is committed to the demonstration of educational excellence and regularly seeks feedback from students. Students are encouraged to offer feedback directly to their Course Convener or through their College and Course representatives (if applicable). The feedback given in these surveys is anonymous and provides the Colleges, University Education Committee and Academic Board with opportunities to recognise excellent teaching, and opportunities for improvement. The Surveys and Evaluation website provides more information on student surveys at ANU and reports on the feedback provided on ANU courses.

Class Schedule

Week/Session Summary of Activities Assessment
1 Organization, Overview, Introduction of MEMS/NEMS HW1 assigned
2 Micro-/Nano-fabrication Processes I HW2 assigned
3 Micro-/Nano-fabrication Processes II HW1 due, HW3 assigned
4 Nano-lithography Technology for MEMS/NEMS Devices HW2 due, HW4 assigned
5 MEMS/NEMS Actuators HW3 due, HW5 assigned
6 MEMS Sensor Characterization and Analysing I HW4 due
7 MEMS Sensor Characterization and Analysing II HW5 due, Project assigned
8 MEMS/NEMS Resonators for Bio-molecule Sensing
9 MEMS Gyroscopes and Applications
10 Introduction to Micro-fluidics for Bio-sensing Project presentation
11 Advanced MEMS/NEMS Devices by Bottom-up Technology Project presentation
12 Emerging Applications, Lecture and Summary Project Report Due

Assessment Summary

Assessment task Value Learning Outcomes
Five Homework Assignments 40 % 1, 2, 3, 4, 5
Project Report 10 % 2, 4, 6
Project Presentation 10 % 2, 4, 6
Final Exam 40 % 1, 2, 3, 4, 5, 6

* If the Due Date and Return of Assessment date are blank, see the Assessment Tab for specific Assessment Task details


ANU has educational policies, procedures and guidelines, which are designed to ensure that staff and students are aware of the University’s academic standards, and implement them. Students are expected to have read the Academic Misconduct Rule before the commencement of their course. Other key policies and guidelines include:

Assessment Requirements

The ANU is using Turnitin to enhance student citation and referencing techniques, and to assess assignment submissions as a component of the University's approach to managing Academic Integrity. For additional information regarding Turnitin please visit the ANU Online website Students may choose not to submit assessment items through Turnitin. In this instance you will be required to submit, alongside the assessment item itself, hard copies of all references included in the assessment item.

Moderation of Assessment

Marks that are allocated during Semester are to be considered provisional until formalised by the College examiners meeting at the end of each Semester. If appropriate, some moderation of marks might be applied prior to final results being released.

Assessment Task 1

Value: 40 %
Learning Outcomes: 1, 2, 3, 4, 5

Five Homework Assignments

Five homework assignments will be released in the first six weeks. The specific due date of each assignment will be provided on the assignment sheet.

Assessment Task 2

Value: 10 %
Learning Outcomes: 2, 4, 6

Project Report

A team project will be assigned starting from week 8. Teams can be formed (2 students each team) via self-grouping. A series of projects topics will be provided and each team can choose one topic for their project. The detailed guideline for the project will be provided on wattle.

Assessment Task 3

Value: 10 %
Learning Outcomes: 2, 4, 6

Project Presentation

A final presentation for the project is needed. The detailed guideline for the project presentation will be provided on wattle.

Assessment Task 4

Value: 40 %
Learning Outcomes: 1, 2, 3, 4, 5, 6

Final Exam

Academic Integrity

Academic integrity is a core part of our culture as a community of scholars. At its heart, academic integrity is about behaving ethically. This means that all members of the community commit to honest and responsible scholarly practice and to upholding these values with respect and fairness. The Australian National University commits to embedding the values of academic integrity in our teaching and learning. We ensure that all members of our community understand how to engage in academic work in ways that are consistent with, and actively support academic integrity. The ANU expects staff and students to uphold high standards of academic integrity and act ethically and honestly, to ensure the quality and value of the qualification that you will graduate with. The University has policies and procedures in place to promote academic integrity and manage academic misconduct. Visit the following Academic honesty & plagiarism website for more information about academic integrity and what the ANU considers academic misconduct. The ANU offers a number of services to assist students with their assignments, examinations, and other learning activities. The Academic Skills and Learning Centre offers a number of workshops and seminars that you may find useful for your studies.

Online Submission

The ANU uses Turnitin to enhance student citation and referencing techniques, and to assess assignment submissions as a component of the University's approach to managing Academic Integrity. While the use of Turnitin is not mandatory, the ANU highly recommends Turnitin is used by both teaching staff and students. For additional information regarding Turnitin please visit the ANU Online website.

Hardcopy Submission

For some forms of assessment (hand written assignments, art works, laboratory notes, etc.) hard copy submission is appropriate when approved by the Associate Dean (Education). Hard copy submissions must utilise the Assignment Cover Sheet. Please keep a copy of tasks completed for your records.

Late Submission

No submission of assessment tasks without an extension after the due date will be permitted. If an assessment task is not submitted by the due date, a mark of 0 will be awarded. OR Late submission of assessment tasks without an extension are penalised at the rate of 5% of the possible marks available per working day or part thereof. Late submission of assessment tasks is not accepted after 10 working days after the due date, or on or after the date specified in the course outline for the return of the assessment item. Late submission is not accepted for take-home examinations.

Referencing Requirements

Accepted academic practice for referencing sources that you use in presentations can be found via the links on the Wattle site, under the file named “ANU and College Policies, Program Information, Student Support Services and Assessment”. Alternatively, you can seek help through the Students Learning Development website.

Extensions and Penalties

Extensions and late submission of assessment pieces are covered by the Student Assessment (Coursework) Policy and Procedure The Course Convener may grant extensions for assessment pieces that are not examinations or take-home examinations. If you need an extension, you must request an extension in writing on or before the due date. If you have documented and appropriate medical evidence that demonstrates you were not able to request an extension on or before the due date, you may be able to request it after the due date.

Privacy Notice

The ANU has made a number of third party, online, databases available for students to use. Use of each online database is conditional on student end users first agreeing to the database licensor’s terms of service and/or privacy policy. Students should read these carefully. In some cases student end users will be required to register an account with the database licensor and submit personal information, including their: first name; last name; ANU email address; and other information. In cases where student end users are asked to submit ‘content’ to a database, such as an assignment or short answers, the database licensor may only use the student’s ‘content’ in accordance with the terms of service — including any (copyright) licence the student grants to the database licensor. Any personal information or content a student submits may be stored by the licensor, potentially offshore, and will be used to process the database service in accordance with the licensors terms of service and/or privacy policy. If any student chooses not to agree to the database licensor’s terms of service or privacy policy, the student will not be able to access and use the database. In these circumstances students should contact their lecturer to enquire about alternative arrangements that are available.

Distribution of grades policy

Academic Quality Assurance Committee monitors the performance of students, including attrition, further study and employment rates and grade distribution, and College reports on quality assurance processes for assessment activities, including alignment with national and international disciplinary and interdisciplinary standards, as well as qualification type learning outcomes. Since first semester 1994, ANU uses a grading scale for all courses. This grading scale is used by all academic areas of the University.

Support for students

The University offers students support through several different services. You may contact the services listed below directly or seek advice from your Course Convener, Student Administrators, or your College and Course representatives (if applicable).
AsPr Yuerui Lu

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AsPr Yuerui Lu

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AsPr Yuerui Lu

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AsPr Yuerui Lu

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Hao Qin

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