• Offered by School of Engineering
  • ANU College ANU College of Engineering and Computer Science
  • Course subject Engineering
  • Areas of interest Engineering, Mechatronics, Electronics, Materials, Mechanical More...
  • Academic career UGRD
  • Course convener
    • AsPr Yuerui Lu
  • Mode of delivery In Person
  • Offered in Second Semester 2021
    See Future Offerings

Course has been adjusted for remote participation in 2021. Some on-campus activities are available. Attendance at these where possible is encouraged.

This is an interdisciplinary course that combines biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry. MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fludics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nanometer scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics.

Learning Outcomes

Upon successful completion, students will have the knowledge and skills to:

  1. Describe the fundamental working principle of bio-molecule sensing/sensors, and applying this knowledge to design solutions to probe biomedical and biology systems.
  2. Use point fabrication procedures in practical process integration.
  3. Demonstrate a detailed understanding of the fundamental principles of nanotechnology and their application to biomedical engineering.
  4. Analyse the fabrication of microfluidic devices, surface functionalization and the limitations of surface micromachining.
  5. Evaluate and employ electrical measurements for MEMS mechanical structure characterization, understanding possible problems encountered in livingsystems.
  6. Apply research principles, methods and theoretical concepts to execute research or design projects related to practical applications of MEMS/NEMS technology.

Other Information

Professional Skills Mapping 

Mapping of Learning Outcomes to Assessment and Professional Competencies

Indicative Assessment

  1. Report (40%); (40) [LO 1,2,3,4,5,6]
  2. Research Project (10%); (10) [LO 1,2,3,4,5,6]
  3. Seminar Presentation (10%); (10) [LO 1,2,3,4,5,6]
  4. Final Exam (40%) (40) [LO 1,2,3,4,5,6]

The ANU uses Turnitin to enhance student citation and referencing techniques, and to assess assignment submissions as a component of the University's approach to managing Academic Integrity. While the use of Turnitin is not mandatory, the ANU highly recommends Turnitin is used by both teaching staff and students. For additional information regarding Turnitin please visit the ANU Online website.


130 hours per semester consisting of the following activities each week:

  • 1.5 hours lectures
  • 1.5 hours tutorial
  • 7 hours of pre-reading and self-directed study

Inherent Requirements

Not applicable

Requisite and Incompatibility

To enrol in this course you must have successfully completed PHYS1013.

Prescribed Texts


Preliminary Reading

Nadim Maluf  and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, ·  ISBN: 978-1580535908

Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367

Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800

Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017

Assumed Knowledge

Understand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.

Areas of Interest

  • Engineering
  • Mechatronics
  • Electronics
  • Materials
  • Mechanical
  • Biomedical Science


Tuition fees are for the academic year indicated at the top of the page.  

Commonwealth Support (CSP) Students
If you have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). More information about your student contribution amount for each course at Fees

Student Contribution Band:
Unit value:
6 units

If you are a domestic graduate coursework student with a Domestic Tuition Fee (DTF) place or international student you will be required to pay course tuition fees (see below). Course tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.

Where there is a unit range displayed for this course, not all unit options below may be available.

6.00 0.12500
Domestic fee paying students
Year Fee
2021 $4410
International fee paying students
Year Fee
2021 $5880
Note: Please note that fee information is for current year only.

Offerings, Dates and Class Summary Links

ANU utilises MyTimetable to enable students to view the timetable for their enrolled courses, browse, then self-allocate to small teaching activities / tutorials so they can better plan their time. Find out more on the Timetable webpage.

The list of offerings for future years is indicative only.
Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.

Second Semester

Class number Class start date Last day to enrol Census date Class end date Mode Of Delivery Class Summary
5713 26 Jul 2021 02 Aug 2021 14 Sep 2021 29 Oct 2021 In Person View

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