Learning Outcomes
Upon successful completion, students will have the knowledge and skills to:
1. Understand the fundamental working principle of bio-molecule sensing; have the basic idea of the conventional bio-molecule sensors.2. Be able to use point fabrication procedures into practical process integration and use electrical measurements for MEMS mechanical structure characterisation.
3. Be able to understand the working principle of biosensors based on MEMS and micro-fludics; be able to estimate limitation of their sensitivities.
4. Quantitatively understand the fabrication of microfluidic devices, surface functionalization and limitation of surface micromachining.
5. Understand the merits of lab-on-chip devices based on MEMS and know the current challenge of bio-sensing.
Professional Skills
Mapping
Indicative Assessment
Homework: 10% per
homework (three times)
Midterm Paper
Discussion: 20%
Final Project Report:
50%
The ANU uses Turnitin to enhance student citation and referencing techniques, and to assess assignment submissions as a component of the University's approach to managing Academic Integrity. While the use of Turnitin is not mandatory, the ANU highly recommends Turnitin is used by both teaching staff and students. For additional information regarding Turnitin please visit the ANU Online website.
Workload
1.5 hours of lecture; 2~3 hours of homework.
Requisite and Incompatibility
Preliminary Reading
Nadim Maluf and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, · ISBN: 978-1580535908
Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367
Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800
Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017
Assumed Knowledge
Understand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.Areas of Interest
- Engineering
- Mechatronics
- Electronics
- Materials
- Mechanical
- Biomedical Science
Majors
Minors
Fees
Tuition fees are for the academic year indicated at the top of the page.
If you are a domestic graduate coursework or international student you will be required to pay tuition fees. Tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.
- Student Contribution Band:
- 2
- Unit value:
- 6 units
If you are an undergraduate student and have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). You can find your student contribution amount for each course at Fees. Where there is a unit range displayed for this course, not all unit options below may be available.
| Units | EFTSL |
|---|---|
| 6.00 | 0.12500 |
Course fees
- Domestic fee paying students
| Year | Fee |
|---|---|
| 2015 | $3096 |
- International fee paying students
| Year | Fee |
|---|---|
| 2015 | $4146 |
Offerings, Dates and Class Summary Links
ANU utilises MyTimetable to enable students to view the timetable for their enrolled courses, browse, then self-allocate to small teaching activities / tutorials so they can better plan their time. Find out more on the Timetable webpage.
Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.
Second Semester
| Class number | Class start date | Last day to enrol | Census date | Class end date | Mode Of Delivery | Class Summary |
|---|---|---|---|---|---|---|
| 3565 | 20 Jul 2015 | 07 Aug 2015 | 31 Aug 2015 | 30 Oct 2015 | In Person | N/A |
