• Offered by Research School of Engineering
  • ANU College ANU College of Engineering and Computer Science
  • Course subject Engineering
  • Areas of interest Engineering, Mechatronics, Electronics, Materials, Mechanical More...
  • Academic career UGRD
  • Mode of delivery In Person
  • Offered in Second Semester 2017
    See Future Offerings
This is an interdisciplinary course interfering with biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry.  MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fludics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nano-meter scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics. 
 
Main topics:
• Micro -fabrication and Micro-structures
• Bio-sensors based on mechanical resonator
• Surface functionalization
• Bio-molecule mass transportation
• Micro-fludics for bio-sensing
• Bio-molecule interaction
• Bio-sensing sensitivity and limitation
 

Learning Outcomes

Upon successful completion, students will have the knowledge and skills to:

Upon successful completion of this course, students will have the knowledge and skills to:
  1. Describe and apply the fundamental working principle of bio-molecule sensing/sensors, and applying this knowledge to design solutions to probe biomedical and biology systems.
  2. Demonstrate the capability to use point fabrication procedures in practical process integration.
  3. Demonstrate a detailed understanding of the fundamental principles of nanotechnology and their application to biomedical engineering.
  4. Analyse the fabrication of microfluidic devices, surface functionalization and the limitations of surface micromachining.
  5. Evaluate and employ electrical measurements for MEMS mechanical structure characterization, understanding possible problems encountered in living systems.
  6. Critique the merits of lab-on-chip devices based on MEMS and the current challenges of bio-sensing, using this insight to apply electrical and mechanical system engineering techniques to solve biomedical problems.

Professional Skills Mapping
Mapping of Learning Outcomes to Assessment and Professional Competencies

Indicative Assessment

  1. Homework: 10% per homework (three times)
  2. Midterm Paper Discussion: 20%
  3. Final Project Report: 50%

The ANU uses Turnitin to enhance student citation and referencing techniques, and to assess assignment submissions as a component of the University's approach to managing Academic Integrity. While the use of Turnitin is not mandatory, the ANU highly recommends Turnitin is used by both teaching staff and students. For additional information regarding Turnitin please visit the ANU Online website.

Workload

1.5 hours lectures per week, 1.5 hours tutorial per week

Requisite and Incompatibility

To enrol in this course you must have successfully completed PHYS1101.

Preliminary Reading

Nadim Maluf  and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, ·  ISBN: 978-1580535908

Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367

Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800

Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017

Assumed Knowledge

Understand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.

Areas of Interest

  • Engineering
  • Mechatronics
  • Electronics
  • Materials
  • Mechanical
  • Biomedical Science

Majors

Minors

Fees

Tuition fees are for the academic year indicated at the top of the page.  

If you are a domestic graduate coursework or international student you will be required to pay tuition fees. Tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.

Student Contribution Band:
2
Unit value:
6 units

If you are an undergraduate student and have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). You can find your student contribution amount for each course at Fees.  Where there is a unit range displayed for this course, not all unit options below may be available.

Units EFTSL
6.00 0.12500
Domestic fee paying students
Year Fee
2017 $3852
International fee paying students
Year Fee
2017 $5130
Note: Please note that fee information is for current year only.

Offerings, Dates and Class Summary Links

The list of offerings for future years is indicative only.
Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.

Second Semester

Class number Class start date Last day to enrol Census date Class end date Mode Of Delivery Class Summary
8726 24 Jul 2017 31 Jul 2017 31 Aug 2017 27 Oct 2017 In Person N/A

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