- Code ENGN4820
- Unit Value 6 units
- Offered by Research School of Engineering
- ANU College ANU College of Engineering and Computer Science
- Course subject Engineering
- Areas of interest Engineering, Mechatronics, Electronics, Materials, Mechanical More...
- Academic career UGRD
- Dr Yuerui Lu
- Mode of delivery In Person
Second Semester 2016
See Future Offerings
Upon successful completion, students will have the knowledge and skills to:1. Understand the fundamental working principle of bio-molecule sensing; have the basic idea of the conventional bio-molecule sensors.
2. Be able to use point fabrication procedures into practical process integration and use electrical measurements for MEMS mechanical structure characterisation.
3. Be able to understand the working principle of biosensors based on MEMS and micro-fludics; be able to estimate limitation of their sensitivities.
4. Quantitatively understand the fabrication of microfluidic devices, surface functionalization and limitation of surface micromachining.
5. Understand the merits of lab-on-chip devices based on MEMS and know the current challenge of bio-sensing.
Homework: 10% per
homework (three times)
Midterm Paper Discussion: 20%
Final Project Report: 50%
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1.5 hours of lecture; 2~3 hours of homework.
Requisite and Incompatibility
Preliminary ReadingNadim Maluf and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, · ISBN: 978-1580535908
Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367
Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017
Assumed KnowledgeUnderstand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.
Areas of Interest
- Biomedical Science
Tuition fees are for the academic year indicated at the top of the page.
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- Student Contribution Band:
- Unit value:
- 6 units
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|Class number||Class start date||Last day to enrol||Census date||Class end date||Mode Of Delivery||Class Summary|
|9062||18 Jul 2016||29 Jul 2016||31 Aug 2016||28 Oct 2016||In Person||N/A|