- Code ENGN4820
- Unit Value 6 units
- Offered by School of Engineering
- ANU College ANU College of Engineering Computing & Cybernetics
- Course subject Engineering
- Areas of interest Engineering, Mechatronics, Electronics, Materials, Mechanical More...
- Academic career UGRD
- Prof Yuerui Lu
- Mode of delivery In Person
Second Semester 2023
See Future Offerings
Upon successful completion, students will have the knowledge and skills to:
- Describe the fundamental working principle of bio-molecule sensing/sensors, and applying this knowledge to design solutions to probe biomedical and biology systems.
- Use point fabrication procedures in practical process integration.
- Demonstrate a detailed understanding of the fundamental principles of nanotechnology and their application to biomedical engineering.
- Analyse the fabrication of microfluidic devices, surface functionalization and the limitations of surface micromachining.
- Evaluate and employ electrical measurements for MEMS mechanical structure characterization, understanding possible problems encountered in livingsystems.
- Apply research principles, methods and theoretical concepts to execute research or design projects related to practical applications of MEMS/NEMS technology.
Professional Skills Mapping
Mapping of Learning Outcomes to Assessment and Professional Competencies
- Report (40%); (40) [LO 1,2,3,4,5,6]
- Research Project (10%); (10) [LO 1,2,3,4,5,6]
- Seminar Presentation (10%); (10) [LO 1,2,3,4,5,6]
- Final Exam (40%) (40) [LO 1,2,3,4,5,6]
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130 hours per semester consisting of the following activities each week:
- 1.5 hours lectures
- 1.5 hours tutorial
- 7 hours of pre-reading and self-directed study
Requisite and Incompatibility
Nadim Maluf and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, · ISBN: 978-1580535908
Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367
Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800
Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017
Assumed KnowledgeUnderstand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.
Areas of Interest
- Biomedical Science
Tuition fees are for the academic year indicated at the top of the page.
Commonwealth Support (CSP) Students
If you have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). More information about your student contribution amount for each course at Fees.
- Student Contribution Band:
- Unit value:
- 6 units
If you are a domestic graduate coursework student with a Domestic Tuition Fee (DTF) place or international student you will be required to pay course tuition fees (see below). Course tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.
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- Domestic fee paying students
- International fee paying students
Offerings, Dates and Class Summary Links
ANU utilises MyTimetable to enable students to view the timetable for their enrolled courses, browse, then self-allocate to small teaching activities / tutorials so they can better plan their time. Find out more on the Timetable webpage.
Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.
|Class number||Class start date||Last day to enrol||Census date||Class end date||Mode Of Delivery||Class Summary|
|5539||24 Jul 2023||31 Jul 2023||31 Aug 2023||27 Oct 2023||In Person||N/A|