- Code ENGN4820
- Unit Value 6 units
- Offered by RS Electrical, Energy and Materials Engineering
- ANU College ANU College of Engineering and Computer Science
- Course subject Engineering
- Areas of interest Engineering, Mechatronics, Electronics, Materials, Mechanical More...
- Academic career UGRD
- Dr Yuerui Lu
- Mode of delivery In Person
Second Semester 2019
See Future Offerings
Upon successful completion, students will have the knowledge and skills to:On successful completion of this course, students should have the skills and knowledge to:
- Describe the fundamental working principle of bio-molecule sensing/sensors, and applying this knowledge to design solutions to probe biomedical and biology systems.
- Use point fabrication procedures in practical process integration.
- Demonstrate a detailed understanding of the fundamental principles of nanotechnology and their application to biomedical engineering.
- Analyse the fabrication of microfluidic devices, surface functionalization and the limitations of surface micromachining.
- Evaluate and employ electrical measurements for MEMS mechanical structure characterization, understanding possible problems encountered in livingsystems.
- Apply research principles, methods and theoretical concepts to execute research or design projects related to practical applications of MEMS/NEMS technology.
Professional Skills Mapping
Mapping of Learning Outcomes to Assessment and Professional Competencies
- Report (40%);
- Research Project (10%);
- Seminar Presentation (10%);
- Final Exam (40%)
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Workload1.5 hours lectures per week, 1.5 hours tutorial per week
Requisite and Incompatibility
Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367
Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017
Assumed KnowledgeUnderstand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.
Areas of Interest
- Biomedical Science
Tuition fees are for the academic year indicated at the top of the page.
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- Student Contribution Band:
- Unit value:
- 6 units
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Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.
|Class number||Class start date||Last day to enrol||Census date||Class end date||Mode Of Delivery||Class Summary|
|8379||22 Jul 2019||29 Jul 2019||31 Aug 2019||25 Oct 2019||In Person||N/A|