- Code ENGN4820
- Unit Value 6 units
This is an interdisciplinary course that combines biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry. MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fluidics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nanometer scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics.
Upon successful completion, students will have the knowledge and skills to:
- Describe the fundamental working principle of bio-molecule sensing/sensors, and applying this knowledge to design solutions to probe biomedical and biology systems.
- Use point fabrication procedures in practical process integration.
- Demonstrate a detailed understanding of the fundamental principles of nanotechnology and their application to biomedical engineering.
- Analyse the fabrication of microfluidic devices, surface functionalization and the limitations of surface micromachining.
- Evaluate and employ electrical measurements for MEMS mechanical structure characterization, understanding possible problems encountered in living systems.
- Apply research principles, methods and theoretical concepts to execute research or design projects related to practical applications of MEMS/NEMS technology.
Professional Skills Mapping
- Report (40) [LO 1,2,3,4]
- Research Project (10) [LO 4,5,6]
- Seminar Presentation (10) [LO 3,4,5,6]
- Final Exam (40) [LO 1,2,3,4,5]
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130 hours per semester consisting of the following activities each week:
- 1.5 hours lectures
- 1.5 hours tutorial
- 7 hours of pre-reading and self-directed study
Requisite and Incompatibility
Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367
Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017
Understand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.
Areas of Interest
- Biomedical Science
Tuition fees are for the academic year indicated at the top of the page.
Commonwealth Support (CSP) Students
If you have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). More information about your student contribution amount for each course at Fees.
- Student Contribution Band:
- Unit value:
- 6 units
If you are a domestic graduate coursework student with a Domestic Tuition Fee (DTF) place or international student you will be required to pay course tuition fees (see below). Course tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.
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Offerings, Dates and Class Summary Links
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|Class number||Class start date||Last day to enrol||Census date||Class end date||Mode Of Delivery||Class Summary|
|7337||21 Jul 2025||28 Jul 2025||31 Aug 2025||24 Oct 2025||In Person||N/A|