• Offered by Research School of Engineering
  • ANU College ANU College of Engineering and Computer Science
  • Course subject Engineering
  • Areas of interest Engineering, Mechatronics, Electronics, Materials, Mechanical More...
  • Academic career UGRD
  • Course convener
    • Dr Yuerui Lu
  • Mode of delivery In Person
  • Offered in Second Semester 2016
    See Future Offerings
This is an interdisciplinary course interfering with biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry.  MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fludics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nano-meter scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics. 
Main topics:
• Micro -fabrication and Micro-structures
• Bio-sensors based on mechanical resonator
• Surface functionalization
• Bio-molecule mass transportation
• Micro-fludics for bio-sensing
• Bio-molecule interaction
• Bio-sensing sensitivity and limitation

Learning Outcomes

Upon successful completion, students will have the knowledge and skills to:

1.  Understand the fundamental working principle of bio-molecule sensing; have the basic idea of the conventional bio-molecule sensors.
2. Be able to
 use point fabrication procedures into practical process integration and use electrical measurements for MEMS mechanical structure characterisation.
Be able to understand the working principle of biosensors based on MEMS and micro-fludics; be able to estimate limitation of their sensitivities.
Quantitatively understand the fabrication of microfluidic devices, surface functionalization and limitation of surface micromachining.
Understand the merits of lab-on-chip devices based on MEMS and know the current challenge of bio-sensing.

Professional Skills Mapping

Mapping of Learning Outcomes to Assessment and Professional Competencies

Indicative Assessment

Homework: 10% per homework (three times)
Midterm Paper Discussion: 20%
Final Project Report: 50%

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1.5 hours of lecture; 2~3 hours of homework.

Requisite and Incompatibility

To enrol in this course you must have successfully completed PHYS1101.

Preliminary Reading

Nadim Maluf  and Kirt Williams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, ·  ISBN: 978-1580535908

Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367

Marc J. Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800

Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017

Assumed Knowledge

Understand basic semiconductor device concepts and terminology; understand basic concepts of bio-molecules, solid state physics, surface chemistry and mechanics.

Areas of Interest

  • Engineering
  • Mechatronics
  • Electronics
  • Materials
  • Mechanical
  • Biomedical Science




Tuition fees are for the academic year indicated at the top of the page.  

If you are a domestic graduate coursework or international student you will be required to pay tuition fees. Tuition fees are indexed annually. Further information for domestic and international students about tuition and other fees can be found at Fees.

Student Contribution Band:
Unit value:
6 units

If you are an undergraduate student and have been offered a Commonwealth supported place, your fees are set by the Australian Government for each course. At ANU 1 EFTSL is 48 units (normally 8 x 6-unit courses). You can find your student contribution amount for each course at Fees.  Where there is a unit range displayed for this course, not all unit options below may be available.

6.00 0.12500
Domestic fee paying students
Year Fee
2016 $3480
International fee paying students
Year Fee
2016 $4638
Note: Please note that fee information is for current year only.

Offerings, Dates and Class Summary Links

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The list of offerings for future years is indicative only.
Class summaries, if available, can be accessed by clicking on the View link for the relevant class number.

Second Semester

Class number Class start date Last day to enrol Census date Class end date Mode Of Delivery Class Summary
9062 18 Jul 2016 29 Jul 2016 31 Aug 2016 28 Oct 2016 In Person N/A

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